MEMS scanner

Piezoelectric film: PZT

MEMS Projector

MicroElectroMechanical system (MEMS) scanners have been under the spotlight for past couple of decades. Pico Projectors, also known as handheld projectors, add functionality to portable devices such as cameras, mobile phones and tablets. Currently the performance scanners use either electromagnetic or electrostatic based actuation. However, piezoelectric actuation is a promising alternative due to its superior energy efficiency and opens up the possibility of further miniaturization.­


  • Deposition and integration of the piezoelectric thin films (PZT)    

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