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Convers
d33,f (DBLI)
•On wafer Pieces
•Top electrode deposition (Pt, Au,..)
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Dielectric
and ferroelectric measurements
•On wafer Pieces, full wafer
•Top electrode deposition (Pt, Au,..)
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Convers
e31,f
•On special designed cantilevers
•Top electrode deposition (Pt, Au,..)
•Samples sawing for cantilevers with full
wafer thickness
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Direct
e31,f
•On special designed cantilevers
•Top electrode deposition (Pt, Au,..)
•Samples sawing for cantilevers with full
wafer thickness
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TF Analyzer 2000 (aixACCT)
•Complete
ferroelectric characterization pakage
•Direct
and Converse Piezoelectric coefficient
•Measurement
on wafer pieces
•Samples
sawing for cantilevers with full wafer thickness
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RF
Measurement
•Network Analyzer and probe station
•Design and fabrication of test structures
for material characterization
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XRD
On wafer Pieces, full wafer 4", 6" |
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